Gridless ionized metal flux fraction measurement tool for use in ionized physical vapor deposition studies

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dc.contributor.authorSnodgrass, Thomas G.en_US
dc.contributor.authorBooske, John H.en_US
dc.contributor.authorWang, Weitungen_US
dc.contributor.authorWendt, Amy E.en_US
dc.contributor.authorShohet, J. Leonen_US
dc.date.accessioned2007-07-13T19:27:49Z
dc.date.available2007-07-13T19:27:49Z
dc.date.issued1999en_US
dc.descriptionThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.format.extent371020 bytes
dc.format.mimetypeapplication/pdfen_US
dc.format.mimetypeapplication/pdf
dc.identifier.citationThe following article appeared in Snodgrass, T.G., Booske, J.H., Wang, W., Wendt, A.E., & Shohet, J.L. (1999). Gridless Ionized Metal Flux Fraction Measurement Tool For Use In Ionized Physical Vapor Deposition Studies. Review Of Scientific Instruments, 70(2), 1525-1529. and may be found at http://link.aip.org/link/?rsi/70/1525en_US
dc.identifier.doihttp://dx.doi.org/10.1063/1.1149618en_US
dc.identifier.urihttp://digital.library.wisc.edu/1793/10380
dc.publisherAmerican Institute of Physics Incen_US
dc.relation.ispartofhttp://www.aip.orgen_US
dc.relation.ispartofhttp://rsi.aip.orgen_US
dc.rightsCopyright 1999 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.en_US
dc.titleGridless ionized metal flux fraction measurement tool for use in ionized physical vapor deposition studiesen_US

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