Electron heating by sheaths in radio frequency discharges

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dc.contributor.authorWendt, Amy E.en_US
dc.contributor.authorHitchon, William Nicholas Guyen_US
dc.date.accessioned2007-07-13T19:19:18Z
dc.date.available2007-07-13T19:19:18Z
dc.date.issued1992en_US
dc.descriptionThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.format.extent1204973 bytes
dc.format.mimetypeapplication/pdfen_US
dc.format.mimetypeapplication/pdf
dc.identifier.citationThe following article appeared in Wendt, A.E., & Hitchon, W.N.G. (1992). Electron Heating By Sheaths In Radio Frequency Discharges. Journal Of Applied Physics, 71(10), 4718-26. and may be found at http://link.aip.org/link/?jap/71/4718en_US
dc.identifier.doihttp://dx.doi.org/10.1063/1.350662en_US
dc.identifier.urihttp://digital.library.wisc.edu/1793/9252
dc.relation.ispartofhttp://www.aip.orgen_US
dc.relation.ispartofhttp://jap.aip.orgen_US
dc.rightsCopyright 1992 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.en_US
dc.titleElectron heating by sheaths in radio frequency dischargesen_US

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