Thickness dependence of structural and piezoelectric properties of epitaxial Pb(Zr0.52Ti0.48)O3 films on Si and SrTiO3 substrates

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Kim, Dong Min
Eom, Chang-Beom
Nagarajan, Valanoor
Ouyang, Jun
Ramesh, Ramamoorthy
Vaithyanathan, Venugopalan
Schlom, Darrell G.

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http://dx.doi.org/10.1063/1.2185614

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American Institute of Physics Inc., Melville, NY 11747-4502, United States

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The following article appeared in Kim, D.M., Eom, C.B., Nagarajan, V., Ouyang, J., Ramesh, R., Vaithyanathan, V., et al. (2006). Thickness Dependence Of Structural And Piezoelectric Properties Of Epitaxial Pb(Zr0.52 Ti0.48)O3 Films On Si And Sr Ti O3 Substrates. Applied Physics Letters, 88(14), 142904-. and may be found at http://link.aip.org/link/?apl/88/142904

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