Plasma properties determined with induction loop probes in a planar inductively coupled plasma source
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Meyer, J.A.
Mau, Robert
Wendt, Amy E.
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http://dx.doi.org/10.1063/1.361025
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American Institute of Physics
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The following article appeared in Meyer, J.A., Mau, R., & Wendt, A.E. (1996). Plasma Properties Determined With Induction Loop Probes In A Planar Inductively Coupled Plasma Source. Journal Of Applied Physics, 79(3), 1298-302. and may be found at http://link.aip.org/link/?jap/79/1298