Electromagnetic fast firing for ultrashallow junction formation
| dc.contributor.author | Thompson, Keith | en_US |
| dc.contributor.author | Booske, John H. | en_US |
| dc.contributor.author | Cooper, Reid F. | en_US |
| dc.contributor.author | Gianchandani, Yogesh B. | en_US |
| dc.date.accessioned | 2007-07-13T19:26:34Z | |
| dc.date.available | 2007-07-13T19:26:34Z | |
| dc.date.issued | 2003 | en_US |
| dc.description | This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. | en_US |
| dc.format.extent | 581633 bytes | |
| dc.format.mimetype | application/pdf | en_US |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Thompson, K., Booske, J. H., Cooper, R. F., & Gianchandani, Y. B. (2003). Electromagnetic Fast Firing For Ultrashallow Junction Formation. Ieee Transactions On Semiconductor Manufacturing, 16(3), 460-468. | en_US |
| dc.identifier.doi | http://dx.doi.org/10.1109/TSM.2003.815198 | en_US |
| dc.identifier.uri | http://digital.library.wisc.edu/1793/10216 | |
| dc.publisher | Institute of Electrical and Electronics Engineers Inc | en_US |
| dc.relation.ispartof | http://www.ieee.org/ | en_US |
| dc.relation.ispartof | http://ieeexplore.ieee.org/servlet/opac?punumber=66 | en_US |
| dc.rights | Copyright 2003 Institute of Electrical and Electronics Engineers | en_US |
| dc.rights | ©20xx IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | en_US |
| dc.title | Electromagnetic fast firing for ultrashallow junction formation | en_US |
Files
Original bundle
1 - 1 of 1