Absolute densities of long lived species in an ionized physical vapor deposition copper-argon plasma
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Andrew, Yasmin
Abraham, Ion C.
Booske, John H.
Lu, Zhi-Cherng
Wendt, Amy E.
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http://dx.doi.org/10.1063/1.1289219
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American Institute of Physics Inc
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The following article appeared in Andrew, Y., Abraham, I., Booske, J.H., Lu, Z.C., & Wendt, A.E. (2000). Absolute Densities Of Long Lived Species In An Ionized Physical Vapor Deposition Copper Argon Plasma. Journal Of Applied Physics, 88(6), 3208-3219. and may be found at http://link.aip.org/link/?jap/88/3208