Modeling of profile effects for inductive helicon plasma sources

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Mouzouris, Yiannis
Scharer, John E.

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http://dx.doi.org/10.1109/27.491753

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IEEE, Piscataway, NJ, USA

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Mouzouris, Y., & Scharer, J. E. (1996). Modeling Of Profile Effects For Inductive Helicon Plasma Sources. Ieee Transactions On Plasma Science, 24(1), 152-160.

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