3D SEM Surface Reconstruction: An Optimized, Adaptive, and Intelligent Approach

Abstract

Structural analysis of microscopic objects is a longstanding topic in several scientific disciplines, including biological, mechanical, and material sciences. The scanning electron microscope (SEM), as a promising imaging equipment has been around to determine the surface properties (e.g., compositions or geometries) of specimens by achieving increased magnification, contrast, and resolution greater than one nanometer. Whereas SEM micrographs still remain two-dimensional (2D), many research and educational questions truly require knowledge and information about their three-dimensional (3D) surface structures. Having 3D surfaces from SEM images would provide true anatomic shapes of micro samples which would allow for quantitative measurements and informative visualization of the systems being investigated. In this research project, we novel design and develop an optimized, adaptive, and intelligent multi-view approach named 3DSEM++ for 3D surface reconstruction of SEM images, making a 3D SEM dataset publicly and freely available to the research community. The work is expected to stimulate more interest and draw attention from the computer vision and multimedia communities to the fast-growing SEM application area.