Electron-density and energy distributions in a planar inductively coupled discharge

Simple item page
dc.contributor.authorMahoney, Leonard J.en_US
dc.contributor.authorWendt, Amy E.en_US
dc.contributor.authorBarrios, Ernestoen_US
dc.contributor.authorRichards, Carolyn J.en_US
dc.contributor.authorShohet, J. Leonen_US
dc.date.accessioned2007-07-13T19:21:38Z
dc.date.available2007-07-13T19:21:38Z
dc.date.issued1994en_US
dc.descriptionThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.format.extent1419687 bytes
dc.format.mimetypeapplication/pdfen_US
dc.format.mimetypeapplication/pdf
dc.identifier.citationThe following article appeared in Mahoney, L.J., Wendt, A.E., Barrios, E., Richards, C.J., & Shohet, J.L. (1994). Electron Density And Energy Distributions In A Planar Inductively Coupled Discharge. Journal Of Applied Physics, 76(4), 2041-7. and may be found at http://link.aip.org/link/?jap/76/2041en_US
dc.identifier.doihttp://dx.doi.org/10.1063/1.357672en_US
dc.identifier.urihttp://digital.library.wisc.edu/1793/9564
dc.relation.ispartofhttp://www.aip.orgen_US
dc.relation.ispartofhttp://jap.aip.orgen_US
dc.rightsCopyright 1994 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.en_US
dc.titleElectron-density and energy distributions in a planar inductively coupled dischargeen_US

Files

Original bundle

Now showing 1 - 1 of 1
Thumbnail Image
Name:
file_1.pdf
Size:
1.35 MB
Format:
Adobe Portable Document Format
Download

Collections

College of Engineering Publications