Distribution of Incident Ions and Retained Dose Analysis for a Wedge-Shaped Target in Plasma Source Ion-Implantation
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Malik, Shamim M.
Muller, David Eric
Sridharan, Kumar
Fetherston, R. Paul
Tran, Ngoc C.
Conrad, John R.
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American Institute of Physics
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The following article appeared in Malik, S.M., Muller, D.E., Sridharan, K., Fetherston, R.P., Tran, N., & Conrad, J.R. (1995). Distribution Of Incident Ions And Retained Dose Analysis For A Wedge Shaped Target In Plasma Source Ion Implantation. Journal Of Applied Physics, 77(3), 1015-1019. and may be found at http://link.aip.org/link/?jap/77/1015