Measurement of Ion Species Ratio in the Plasma Source Ion-Implantation Process
Loading...
Files
Date
Authors
Tang, Benyang
Fetherston, R. Paul
Shamim, Mansoora
Breun, Robert A.
Chen, An
Conrad, John R.
Advisors
License
DOI
Type
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics
Grantor
Abstract
Description
This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
Keywords
Related Material and Data
Citation
The following article appeared in Tang, B.Y., Fetherston, R.P., Shamim, M., Breun, R.A., Chen, A., & Conrad, J.R. (1993). Measurement Of Ion Species Ratio In The Plasma Source Ion Implantation Process. Journal Of Applied Physics, 73(9), 4176-4180. and may be found at http://link.aip.org/link/?jap/73/4176