Low-energy separation by implantation of oxygen structures via plasma source ion implantation
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Goeckner, Matthew J.
Turner, J.E.
Dallmann, Douglas Alan
Kruger, James B.
Shenai, Krishna
Speth, Robert R.
Booske, John H.
Rissman, Paul
Meyyappan, Nara
Lee, S.
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http://dx.doi.org/10.1063/1.112162
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The following article appeared in Zhang, L., Shohet, J.L., Dallmann, D., Booske, J.H., Speth, R.R., Shenai, K., et al. (1994). Low Energy Separation By Implantation Of Oxygen Structures Via Plasma Source Ion Implantation. Applied Physics Letters, 65(8), 962-4. and may be found at http://link.aip.org/link/?apl/65/962